E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) StdPbc-1017 This Standard specifies the testing

This Standard specifies the testing procedures and test equipment required for determining the load impedance and power efficiency of a matching network based on the positions of the tuning elements in the matching network

SEMI MF1530 — Test Method for Measuring Flatness

quartz boats

originally published in 1987

E08800 - SEMI E88 - Specification for AMHS Storage SEM (Stocker SEM) StdPbc-1017 This Standard specifies the testingThis Standard establishes a Specific Equipment Model (SEM) for AMHS storage equipment (Stocker SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of Stocker SEM equipment into an automated (e. g., semiconductor fabrication and flat panel display) factory.