P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools In the months leading up

In the months leading up to the formation of the SEMI Data Path Task Force

The limit of detection is determined by either the BLANK value or by count rate limitations

The calibration method is defined in SEMI M53

All parts of the tube fittings tested by this method in contact with the internal fluid are made of fluorocarbon materials

P02800 - SEMI P28 - Specification for Overlay-Metrology Test Patterns for Integrated-Circuit Manufacture StdTpc-Cluster Tools In the months leading upThis standard was technically approved by the global Micropatterning Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available