C0700 - SEMI C70 - 六フッ化タングステン（WF6）の仕様 Revision:SEMI C70-0611 - Superseded The time zero dielectric breakdown

The time zero dielectric breakdown (TZDB) GOI test method of SEMI M51 is advantageous compared to TDDB to quickly estimate failure rate by intrinsic breakdown (C mode) and accidental breakdown (B mode)

This Test Method is intended for analyzing a wide range of trace elements (see Appendix 1)

pictures and other relevant data for these defects

repeatability

C0700 - SEMI C70 - 六フッ化タングステン（WF6）の仕様 Revision:SEMI C70-0611 - Superseded The time zero dielectric breakdownglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org (WF6) Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals SEMI C3 Specifications for Gases SEMI C10 Guide for Determination of Method Detection Limits