S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction StdPbc-0315 This system appears to the

This system appears to the equipment to be a 300 mm FOUP (except that only the volume around the middle wafer may be accessible)

The presence of unwanted subsurface p-n junctions may have deleterious effects on device operation

A concept of a ‘fixed quality area’ is used

This standard defines the concepts required for management of recipes

S02900 - SEMI S29 - Guide for Fluorinated Greenhouse Gas (F-GHG) Emission Characterization and Reduction StdPbc-0315 This system appears to theThis Standard was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www. semiviews. org and www. semi. org in July 2012. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are