M06200 - SEMI M62 - Specification for Silicon Epitaxial Wafers StdTpc-Stainless Steel Components SEMI M63-0915 (technical revision)

SEMI M63-0915 (technical revision)

It may also be used to characterize other materials exhibiting resistivity in this range

This Standard was technically approved by the Gases Global Technical Committee

本方法の目的は，表面状態に関する重要なパラメータを正確で再現性のよい測定値を得るため，分析装置の各種パラメータと諸条件を全体的に記述することである。

M06200 - SEMI M62 - Specification for Silicon Epitaxial Wafers StdTpc-Stainless Steel Components SEMI M63-0915 (technical revision)* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1