E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-0310 - Superseded 8-1103 (Reapproved 1211)

8-1103 (Reapproved 1211)

and orientation as the unknown specimen

SEMI M64-0915 (Reapproved 0422)

The purpose of this Specification is to define standard criteria for the alphanumeric marking of round compound semiconductor wafers

E15300 - SEMI E153 - AMHS SEMの仕様（AMHS SEM） Revision:SEMI E153-0310 - Superseded 8-1103 (Reapproved 1211)global Information & Control Committee2010120global Audits and Reviews Subcommittee20102www. semi. org200911 AMHSSEMAMHS SEMSEMI E30AMHS SEMAMHS SEMSEMI E84 11GEMSEMI2SECS IISECSTRANSFERTSSC 11GEMAMHS SEMTSSCTRANSFERGEM Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37 High Speed SECS Message Services