F10300 - SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals Revision:SEMI F103-0307 - Inactive flat chuck

flat chuck

ESDによる製品，レチクルおよび装置の損傷を低減する。

2  This Standard applies to three-port/four-fastener components (except mass flow controllers and mass flow meters)

reduce material handling between process and measurement equipment

F10300 - SEMI F103 - Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals Revision:SEMI F103-0307 - Inactive flat chuckThis standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue