D08400 - SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks StdPbc-1217 Arizona’s semiconductor ecosystem is at

Arizona’s semiconductor ecosystem is at an inflection point—poised to transform rapid growth into sustainable global leadership

This Specification provides information for developing specifications for silicon annealed wafers used to fabricate semiconductor devices and integrated circuits

This Practice may also be applied to detection of defects in epitaxial layers

The purpose of this Safety Guideline is to provide information and methods related to flow limiting devices (FLDs) that limit the rate of release of hazardous gases during transportation

D08400 - SEMI D84 - Terminology for FPD Phase Shift Mask and Mask Blanks StdPbc-1217 Arizona’s semiconductor ecosystem is atThis Standard defines the terminology for FPD phase shift masks and mask blanks. This Standard applies to phase shift masks and mask blanks that are principally used in fabricating flat panel displays. Referenced SEMI Standards (purchase separately) None. Revision History SEMI D84 0823 (first published)