F04600 - SEMI F46 - Revision:Default Title including GaAs

including GaAs

Weight loss (see SEMI G75

This edition was approved for publication by the global Audits and Reviews Subcommittee on March 26

The application of integrated metrology is anticipated to become a key factor for advanced process control in future integrated circuit (IC) manufacturing

F04600 - SEMI F46 - Revision:Default Title including GaAsThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been