F04800 - SEMI F48 - Test Method for Determining Trace Metals in Polymer Materials StdTpc-Gases - Specialty form a complete Interoperability Specification

form a complete Interoperability Specification for the ISPM

SEMI E126-0305 (technical revision)

SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications

This Standard is applicable to all gases and vapors used in semiconductor processing

F04800 - SEMI F48 - Test Method for Determining Trace Metals in Polymer Materials StdTpc-Gases - Specialty form a complete Interoperability SpecificationNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Test Method provides a procedure for determining the nonvolatile trace inorganic impurities in bulk polymeric materials. 2 Scope 2. 1 Following digestion by dry ashing (DDA) or digestion in closed vessel