S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン Revision:SEMI S27-0310 - Inactive This Guide is intended to

This Guide is intended to address the application of adapter plates for process equipment cluster tools and single module process equipment whose installation requirements are typically complex (e

covered by native oxide

本スタンダードは，Liquid Chemicals Global Technical Committeeで技術的に承認されている。現版は2014年8月25日，global Audits and Reviews Subcommitteeにて発行が承認された。2014年11月にwww

NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard and are not intended to modify or supersede the official Standard

S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン Revision:SEMI S27-0310 - Inactive This Guide is intended toNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental Health & Safety Global Technical Committee20091216global Audits and Reviews Subcommittee20102www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current