MF181100 - SEMI MF1811 - Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data StdTpc-Equipment - Facilities Interface SEMI S5 — Safety Guideline

SEMI S5 — Safety Guideline for Flow Limiting Devices

To ensure consistent yield control of 3DS-IC products

originally published June 1998

and Final Assemblies

MF181100 - SEMI MF1811 - Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data StdTpc-Equipment - Facilities Interface SEMI S5 — Safety GuidelineThere is some confusion in the roughness measurement community concerning the use of estimators and the calculation of power spectral densities (PSDs) from discrete data sets. Use of this Guide can eliminate these differences and result in the use of consistent units for the PSD and related parameters. It also provides a uniform reporting procedure for digital roughness data that can facilitate communication between different workers and different