M04200 - SEMI M42 - Specification for Compound Semiconductor Epitaxial Wafers StdPbc-0317 Such a kinematic coupling can

Such a kinematic coupling can be used at several interfaces

SEMI 3D10-0814 (Reapproved 1025)

and wafer packaging materials

The notations of crystallographic orientation are unified to prevent possible misunderstandings

M04200 - SEMI M42 - Specification for Compound Semiconductor Epitaxial Wafers StdPbc-0317 Such a kinematic coupling canNOTICE: This Standard was balloted and approved for withdrawal in 2021. Compound semiconductor epitaxial layers have been extensively used for many years as the basis of high speed electronics and optoelectronic devices. There are suppliers of epitaxial layers who will grow material to the customers specification. There is a need to define standardized descriptive terms, tolerance schedules and recommended test methods to reduce ambiguity in the