D00700 - SEMI D7 - FPD Glass Substrate Surface Roughness Measurement Method Revision:SEMI D7-94 (Reapproved 0703) - Inactive SEMI E116-0702 (first published)

SEMI E116-0702 (first published)

Due to the migration to large substrate sizes in FPD production

This Standard describes a Guide for analysis of virgin high-purity ion exchange (HPIX) resin suitable for use in ultrapure water (UPW) polish applications

NOTICE: This Document was completely rewritten in 2016

D00700 - SEMI D7 - FPD Glass Substrate Surface Roughness Measurement Method Revision:SEMI D7-94 (Reapproved 0703) - Inactive SEMI E116-0702 (first published)This Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www. semi. org in July 2003; originally published in 1994. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are