F01000 - SEMI F10 - フッ素樹脂製チューブフィッティングに損傷を生じさせるのに必要な内部圧力を決定するためのテスト方法 StdTpc-Photolithography Metrology Subordinate Standards (included):

Subordinate Standards (included):

ボトムカセットIDタグ領域（オプション）　（1）

1  This Standard establishes two methods for evaluating the chemical resistance of FPD color filters

2 Ωcm for n-type silicon (refer to SEMI MF43)

F01000 - SEMI F10 - フッ素樹脂製チューブフィッティングに損傷を生じさせるのに必要な内部圧力を決定するためのテスト方法 StdTpc-Photolithography Metrology Subordinate Standards (included):NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. SI