F00100 - SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様 StdTpc-Flat Panel Display to be published July 2003

to be published July 2003

インフォパッド　（4）†

This format also lists the codes required by SEMI T6 to identify the parameter being reported in the EDI message

are the thickness and the optical properties of fabricated layers and the critical dimensions (CD) of submicron structures

F00100 - SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様 StdTpc-Flat Panel Display to be published July 2003NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Referenced SEMI Standards (purchase separately) SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Revision History SEMI F1 0812 (technical revision) SEMI F1 96 (technical revision) SEMI F1