E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0709 - Superseded This Guide provides recommendations for

This Guide provides recommendations for equipment static charge limits that are appropriate for the product being manufactured

current/voltage

This standard is intended to set levels of specification for a reusable cassette to ship clean glass substrates and process-added substrates between organizations without compromising substrate integrity

SEMI C29-0301 (technical revision)

E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0709 - Superseded This Guide provides recommendations forThis Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards. This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.