E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded SEMI E125 — Specification for

SEMI E125 — Specification for Equipment Self-Description (EqSD)

The scope of this Standard is to define WJOBJ which represents WJ

It covers both conventional metal face sealing and surface mount gas delivery systems

a basic set of common services (operations) between the FMCS and the FPUs are specified to exchange FPU status information and data

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdDcs-Superseded SEMI E125 — Specification forThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions