E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard StdPbc-0321 SECS-II) are added as adjunct

SECS-II) are added as adjunct standards

本スタンダードのインタフェース仕様は，450mm用テープフレームカセット（450TFC）に準拠するキャリアによって駆動し，結合することを目的としているもので，450TFCに適合している。

the requirements are presented as a guideline

originally published July 2003

E16600 - SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard StdPbc-0321 SECS-II) are added as adjunctThe purpose of this Standard is to ensure minimum necessary level of physical connectivity between the transport module and process modules comprising the cluster tool for 450 mm. It is expected that a process module can be connected to the transport module of any cluster tool with least design change provided that both modules meet the requirement of this Standard. Process modules accept wafers at locations that may vary substantially from one module