G08100 - SEMI G81 - Specification for Map Data Items StdDcs-Current 2 to 20 mm and

2 to 20 mm and within the fixed quality area (FQA)

These conditions may include any aspects of the measurement system affecting the measurement results directly or indirectly (e

SEMI D50-0707 (first published)

This Document may only cover a portion of the properties considered to be part of the purchase specification

G08100 - SEMI G81 - Specification for Map Data Items StdDcs-Current 2 to 20 mm andThis Document describes the data items that relate to electronic substrate mapping. This Document applies only to substrate map data items. This Document does not address the transmission, file naming conventions, storage or archiving of substrate maps. The Specification of which data items are optional and which are required is not specified in this Document. The size of each data item described in this Document is maximum size. The actual size may