P02400 - SEMI P24 - CD測長手順 StdPbc-1020 SEMI F39-0699 (first published)

SEMI F39-0699 (first published)

This Standard will cover the quality criteria and the associated test method for impurities contained in PE bags used for polysilicon feedstock packaging

NOTE 1: The design and fabrication of the sawing guides and the determination of any geometrical parameters is considered outside the scope of this Test Method

They are not recommended for use in acceptance testing until their precision has been evaluated by interlaboratory comparison unless the parties to the test conduct suitable correlation studies

P02400 - SEMI P24 - CD測長手順 StdPbc-1020 SEMI F39-0699 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeNorth American Microlithography Committee2004711North American Regional Standards Committee20049www. semi. org2004111994 NOTICE: This Standard or Safety Guideline has an Inactive Status because the