MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 which will

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disk drives

This Practice can also be used to compare the relative costs of a single instrument under different operating conditions

Alternative methods may be used as long as they comply with SEMI C1 guidelines for method validation

MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 which willThis Test Method covers the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface. Calculation of the TIS, called Haze in some industries, is defined. This Test Method is particularly applicable to clean, optically smooth, front surface reflectors, such as semiconductor wafers, computer disk substrates, and mirrors, because under certain conditions the measured signals can be related to