F01300 - SEMI F13 - Guide for Gas Source Control Equipment Revision:SEMI F13-1101 - Inactive and thickness of the gold

and thickness of the gold plating shall be specified per MIL-G-45204 unless otherwise agreed between vendor and customer

The scope of this Document covers grades of 1

do not require re-testing or re-certification until hardware or software design changes that could affect voltage sag immunity are implemented

the Standard does not specify how this actuation will take place

F01300 - SEMI F13 - Guide for Gas Source Control Equipment Revision:SEMI F13-1101 - Inactive and thickness of the goldThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www. semi. org September 2001; to be published November 2001. Originally published in 1993. The purpose of this document is to provide a guide for the design and operational requirements