E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded SEMI E140-1022 (technical revision)

SEMI E140-1022 (technical revision)

SEMI E116-0704 (technical revision)

本スタンダードは，global Flat Panel Display – Mask Committeeで技術的に承認されている。現版は2006年5月16日，global Audits and Reviews Subcommitteeにて発行が承認された。2006年6月にwww

including those widely used in 300 mm semiconductor factories

E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded SEMI E140-1022 (technical revision)The purpose of this Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader Writer to an upstream controller. A standard interface will increase interchangeability of Carrier ID Reader Writers so that users and equipment suppliers have a wider range of choices. This Standard addresses the functional requirements for a generic Carrier ID Reader Writer