E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces released from semiconductor manufacturing operations
$115.50
Description
released from semiconductor manufacturing operations
Especially non-rectangle shapes are effective
• Helium (He)
SEMI E54-1296 (technical revision)
E02800 - SEMI E28 - マスフローコントローラの圧力仕様のガイドライン StdTpc-300 mm Carriers & Physical Interfaces released from semiconductor manufacturing operationsglobal Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1992200411 Referenced SEMI Standards SEMI E12 Standard for Standard Pressure and Standard Temperature for Flow Units Used in Mass Flow Meters and Mass Flow Controllers
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