MF039800 - SEMI MF398 - Test Method for Majority Carrier Concentration in Semiconductors by Measurement of Wavenumber or Wavelength of the Plasma Resonance Minimum Revision:SEMI MF398-92 (Withdrawn 0307) - Withdrawn - Historical This Standard was technically approved

This Standard was technically approved by the global Micropatterning Committee

The scope of this Document covers a tier of PDMAT

specifications and validated analytical procedures

This Specification covers virgin test wafers in all standard wafer diameters from 2 inch to 300 mm

MF039800 - SEMI MF398 - Test Method for Majority Carrier Concentration in Semiconductors by Measurement of Wavenumber or Wavelength of the Plasma Resonance Minimum Revision:SEMI MF398-92 (Withdrawn 0307) - Withdrawn - Historical This Standard was technically approvedThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published by ASTM International as ASTM F398 74T; previously published as SEMI MF398 92 (Reapproved 2002) NOTICE: This document was balloted and approved for withdrawal in 2007. This test method covers