E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture Revision:SEMI E96-1101 - Superseded and inspection information obtained by

and inspection information obtained by devices such as wafer inspection equipment and review tools

Equipment intended for further productive use includes that being offered for reuse

本方法可便于在世界各地实验室之间统一测试方案和测试结果，用于监测或测量硅粉中B

SEMI F48-0200 (first published)

E09600 - SEMI E96 - Guide for CIM Framework Technical Architecture Revision:SEMI E96-1101 - Superseded and inspection information obtained byNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Guide describes technical architecture choices that enable application components to cooperate in a computer integrated manufacturing (CIM) environment and reduce the effort required to integrate those components into