P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-1111 - Inactive This Standard was technically approved
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Description
This Standard was technically approved by the Flat Panel Display – Color Global Technical Committee
SEMI E113-0724 (complete rewrite)
This method provides a uniform procedure to determine the tensile strength applied to welded connections made by PFA weld fitting
where a 450 FOUP and 450 MAC can be loaded and unloaded
P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-1111 - Inactive This Standard was technically approvedThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published July 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards
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