E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) Revision:SEMI E30-95 - Superseded 4 Although the primary focus

4  Although the primary focus of this Standard is RF power-delivery systems used in the semiconductor processing equipment

SEMI E87-0312 (technical revision)

The purpose of this Standard is to provide recommendations for defining a comprehensive training system for both suppliers and users of equipment for the semiconductor and related industries

• Data that is available across these interfaces

E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) Revision:SEMI E30-95 - Superseded 4 Although the primary focus* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1