G00600 - SEMI G6 - 検査方法 封止リング平坦度 StdTpc-Physical Interfaces The purpose of this Document
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Description
The purpose of this Document is to provide a permanent withdrawal notice for SEMI F15 indicating that the technical content has been superseded by Appendix 2
SEMI M23-0811 (Reapproved 0218)
SEMI E133-1110 (technical revision)
including but not limited to appearance
G00600 - SEMI G6 - 検査方法 封止リング平坦度 StdTpc-Physical Interfaces The purpose of this Document38. 382 mm0. 330 8. 382 mm0. 330 Referenced SEMI Standards None.
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