F00500 - SEMI F5 - ガス状廃棄物処理のガイドライン Revision:SEMI F5-1101 - Inactive this Practice defines a wafer

this Practice defines a wafer coordinate system to facilitate the precise locating and reporting of points on the wafer surface

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This Guide describes the engineering and component requirements for a UPW system used in semiconductor manufacturing

－ この測定法は，サプライヤではプロセスコントロールや出荷検査，ユーザ側では受け入れ検査に使用される。

F00500 - SEMI F5 - ガス状廃棄物処理のガイドライン Revision:SEMI F5-1101 - Inactive this Practice defines a waferNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Environmental Health and Safety CommitteeNorth American Environmental Health & Safety Committee2001827North American Regional Standards Committee20019www. semi. org2001111990 NOTICE: This Standard or Safety Guideline has an