Varian Semiconductor VSEA D-F3164001 Electro Pneumatic Interface PCB Card Rev. B This AERA FC-980C is used

This AERA FC-980C is used working surplus

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The units key is broken in the lock (see photos)

Model No: Series 64

Varian Semiconductor VSEA D-F3164001 Electro Pneumatic Interface PCB Card Rev. B This AERA FC-980C is usedVarian Semiconductor VSEA D F3164001 Electro Pneumatic Interface PCB Card Rev. B Inventory # CONJ 2512 Part No: D F3164001 Model No: ELECTRO PNUEMATIC INTERFACE Rev. B F3164001 This Varian Semiconductor VSEA D F3164001 Electro Pneumatic Interface PCB Card is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping