E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0524 - Current the need to accurately determine

the need to accurately determine roughness of polymer surfaces is important when evaluating fluid handling system components from various sources

the 1/e lifetime (τe) and/or the primary mode lifetime (τ1)

SEMI E40-0200 (technical revision)

This Standard specifies the concepts

E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0524 - Current the need to accurately determineThe purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones. The purpose of this Standard is to provide models which represent carrier logistics management status in