F04000 - SEMI F40 - 化学試験のための薬液分配部品の準備についての作業方法 StdPbc-1019 provide a common understanding of

provide a common understanding of functions of EFEM and associated interfaces between functional elements (components with particular function roles)

The intent of this Standard is not to replicate existing standards or offer competing specifications

higher-level injection is often adopted

Printers with higher resolution may be used

F04000 - SEMI F40 - 化学試験のための薬液分配部品の準備についての作業方法 StdPbc-1019 provide a common understanding ofGlobal Facilities CommitteeNorth American Facilities Committee19981218North American Regional Standards Committee19992SEMI On Line19996 2005510. 21 O 3 49HF30H2O229NH4OHIPA Referenced SEMI Standards None.