E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded The document will serve to

The document will serve to clarify cost reduction items as well as benchmark cost reduction activities

SEMI E122-0703 (Reapproved 1109)

and simulating performance in the potential end use environments and manufacturing processes

BWS measurement performance may surpass what is contained in this Guide

E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded The document will serve toThis Standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of IBSEM equipment into an automated (e. g., semiconductor fabrication and flat panel display)