C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive SEMI E84-0303 (technical revision)

SEMI E84-0303 (technical revision)

and specifying that the equipment shall allow individual actuation of each of these parameters using SEMI standard methods

To accelerate improvements of packaged MEMS devices

注意：本文書への適合を宣言するには，「すべきである（should）」と記載された要件に適合する必要がある。適合を宣言するには，「してもよい，できる（may）」，「提案される（suggested）」，「好ましい（preferred）」，「推奨される（recommended）」と記載された要件，または注記や関連情報に適合する必要はない。

C02500 - SEMI C25 - Specification for Dichloromethane (Methylene Chloride) StdDcs-Inactive SEMI E84-0303 (technical revision)This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 29, 2005. It was available at www. semi. org in February 2006. Originally published 1978; previously published June 1999. NOTICE: This document was completely rewritten in 2006. The purpose of this document is to standardize requirements for dichloromethane (methylene