F06900 - SEMI F69 - Test Method for Transport and Shock Testing of Gas Delivery Systems StdPbc-1020 2 The Guide describes metrology

2  The Guide describes metrology techniques that are applicable to both temporary and permanently BWSs

but deals with material aspects only

This method provides a uniform procedure to determine the tensile strength applied to welded connections made by PFA weld fitting

5 µ or less (0

F06900 - SEMI F69 - Test Method for Transport and Shock Testing of Gas Delivery Systems StdPbc-1020 2 The Guide describes metrologyThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www. semiviews. org and www. semi. org in December 2013; originally published March 2002; previously published July 2008. E This Standard was editorially modified in October 2017. A change was made to correct a nonconforming title per the Procedure