E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011 1-0702 (technical revision)

1-0702 (technical revision)

SEMI M40-0200 (first published)

this Test Method is nondestructive

The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry

E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011 1-0702 (technical revision)global Physical Interfaces and Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org200211200411 RSP Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19. 3 Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E72 Specification and Guide for 300 mm Equipment