F07200 - SEMI F72 - Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components StdPbc-0725 and Ion-Implanted Layers Using an

and Ion-Implanted Layers Using an In-Line Four-Point Probe with the Single-Configuration Procedure

The purpose of this Standard is to provide a recipe operation mechanism which supports similar with or a superset of current practices in the following aspects for easier deployment

SEMI E21 — Specification for Cluster Tool Module Interface: Mechanical Interface and Wafer Transport

1  The control of parameters

F07200 - SEMI F72 - Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components StdPbc-0725 and Ion-Implanted Layers Using anNOTICE: This Document was reapproved with minor editorial changes. The purpose of this Document is to define a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high purity gas distribution system. This Test Method is intended to be applied to the wetted surfaces of stainless steel tubing, fittings, valves, and other components as a measure of the effectiveness of