D00900 - SEMI D9 - FPD基板の用語 Revision:SEMI D9-0303 - Superseded the user of this Specification

the user of this Specification must ensure that the label is of a size that fits the box to be employed

ESDによる製品，レチクルおよび装置の損傷を低減する。

This Specification is part of the SEMI sensor/actuator network (SAN) suite of Standards and defines a specific communications protocol based on the CC-Link standard

SEMI F40-0699E (Reapproved 0918)

D00900 - SEMI D9 - FPD基板の用語 Revision:SEMI D9-0303 - Superseded the user of this SpecificationFPD Materials and Components CommitteeJapanese FPD Materials and Components Committee2003110Japanese Regional Standards Committee20031www. semi. org200331994200111 FPD FPD Referenced SEMI Standards SEMI D3 Quality Area Specification for FPD Substrates SEMI D5 Standard Size for FPD Substrates SEMI D7 FPD Glass Substrate Surface Roughness Measurement Method SEMI D11 Specification for FPD Glass Substrate Cassettes SEMI D12 Specification for Edge