S00400 - SEMI S4 - Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets Revision:SEMI S4-0304 - Inactive SEMI E120 — Specification for

SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E88-0702 (technical revision)

originally published February 1999

注意: 本文書は，2012年，全面的に改訂された。

S00400 - SEMI S4 - Safety Guideline for the Segregation/Separation of Gas Cylinders Contained in Cabinets Revision:SEMI S4-0304 - Inactive SEMI E120 — Specification forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Safety Guideline provides a method for determining cylinders of which types of chemicals should be in separate gas cabinets and which cylinders may be in gas cabinets with each other. This Safety Guideline is intended