F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures volume-C SEMI MF1630-1107 (Reapproved 0718)

SEMI MF1630-1107 (Reapproved 0718)

This Specification allows growth methods that include Czochralski (Cz) method

Define the classification of indoor lighting simulator

本基準欲提供半導體工業特定安全標籤之國際統一格式。

F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures volume-C SEMI MF1630-1107 (Reapproved 0718)This standard was technically reapproved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available on www. semi. org February 1999; to be published June 1999. Originally published in 1993. Editorial changes were made to 3. 1. 1, 6. 2. 1, and 6. 2. 2. This document summarizes gas