M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded This Specification may be applied
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Description
This Specification may be applied to manufacturing process
All such fields can potentially generate electrical stress within an EES item
1 This Specification provides a means to acquire event
within semiconductor device manufacturing facilities
M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded This Specification may be appliedglobal Compound Semiconductor Materials Committee2006116global Audits and Reviews Subcommittee20062www. semi. org20063CD ROM E20068R2 2 Referenced SEMI Standards None.
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