M02000 - SEMI M20 - ウェーハ座標システムの確立の作業方法 Revision:SEMI M20-1110 - Superseded either a symmetrical five-point or

either a symmetrical five-point or nine-point pattern is used

本测试方法适用于分析硅粉中的总碳含量，硅粉用作生产太阳能级多晶硅的原料。本测试方法也可用于测定单晶硅片和硅锭、多晶硅片和硅锭中的总碳含量，前提是在避免污染的情况下将硅片和硅锭破碎成小片或粉末。

and procedures used to measure the lead-to-lead and loading capacitance of package leads

SEMI E88-0999 (first published)

M02000 - SEMI M20 - ウェーハ座標システムの確立の作業方法 Revision:SEMI M20-1110 - Superseded either a symmetrical five-point orNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI x y xyrq zzx y zr q z x yr q 1 x y z r q z Referenced SEMI Standards (purchase separately) SEMI E5 Specification for SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI M1 Specification for Polished Single Crystal