E11500 - SEMI E115 - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-Mass Flow Controllers any special handling required for

any special handling required for IPSs and MPCTs is defined

particularly in components and tubing welded and exposed to corrosive gases and moisture

NOTICE: This Document was completely rewritten in 2016

depending on your company's needs

E11500 - SEMI E115 - Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems StdTpc-Mass Flow Controllers any special handling required forThe purpose of this Standard is to define a test method used to determine the load impedance and efficiency of matching networks used in RF power delivery systems for semiconductor processing equipment. This Standard specifies the testing procedures and test equipment required for determining the load impedance and power efficiency of a matching network based on the positions of the tuning elements in the matching network. The primary focus for this