E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Revision:SEMI E74-0301 - Superseded This Classification is to be

This Classification is to be used in the specification of semiconductor clean environments (including process tool environments) and of contamination control and measurement equipment performance

1-1107 (technical revision)

12-0116 (Reapproved 0922)

The scope of this Document covers high purity zirconium amides

E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps Revision:SEMI E74-0301 - Superseded This Classification is to beNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this