E18500 - SEMI E185 - Specification for 300 mm Tape Frame FOUP StdTpc-Automation Technology · ボックスまたはカセットと装置ロードポートまたは搬送装置との間

·        ボックスまたはカセットと装置ロードポートまたは搬送装置との間

and other information to recommend jobs that maximize effective utilization of factory resources to satisfy product demand and planned objectives

Solar cells made of silicon will be manufactured for many years to come

SEMI E114-0302E (Reapproved 0309)

E18500 - SEMI E185 - Specification for 300 mm Tape Frame FOUP StdTpc-Automation Technology · ボックスまたはカセットと装置ロードポートまたは搬送装置との間1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the Tape Frame FOUP which is intended to be used to transport and store 300 mm tape frames, as specified by SEMI G74 and SEMI G87, within IC manufacturing facilities. 2 Scope 2. 1 This Standard specifies the external features and dimensions of the Tape Frame FOUP. 2. 2 This Standard specifies the internal dimensions for storing the tape frames in the Tape