MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 SEMI M38-1101 (technical revision)

SEMI M38-1101 (technical revision)

本法は，以下に述べる条件のもとで得たテストデータをベースにして，チューブフィッティングの性能を決定するために使用することが出来る。しかし，その結果は性能レーティングを意図するものではない。

SEMI MF1763-0318 (technical revision)

원본은 1992년에 발행되었고

MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 SEMI M38-1101 (technical revision)1 Purpose 1. 1 This Specification provides the standard pitch dimensions for developers of microfluidic devices. 2 Scope 2. 1 This Specification is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly. Referenced SEMI Standards (purchase separately) None. Revision History SEMI MS11 0318 (Reapproved 0525) SEMI MS11 0318 (first published)