E09000 - SEMI E90 - 基板トラッキングの仕様 StdTpc-Process Chemicals - Acids as recommended by this Guide
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as recommended by this Guide
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1 The scope of this Standard is all grades of ammonium fluoride 40% used in the semiconductor industry
originally published in 1984
E09000 - SEMI E90 - 基板トラッキングの仕様 StdTpc-Process Chemicals - Acids as recommended by this GuideNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Subordinate Standards (included): SEMI E90. 1 0312 Specification for SECS II Protocol Substrate Tracking Referenced SEMI Standards (purchase separately) SEMI E30 Specification for the Generic Model for Communications and Control of
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