M00400 - SEMI M4 - Specifications for SOS Epitaxial Wafers StdPbc-0714 1 The purpose of this

1  The purpose of this Standard is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards

SEMI MF671-0312 (Reapproved 1023)

NOTICE: This Document replaces the previous version of SEMI M6 along with SEMI M6

本ガイドは，Global Facilities Committeeで技術的に承認されたもので，North American Facilities Committeeが直接責任を負うものである。現版は2002年11月22日にNorth American Regional Standards Committeeにて承認されている。2003年1月にまずwww

M00400 - SEMI M4 - Specifications for SOS Epitaxial Wafers StdPbc-0714 1 The purpose of thisThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1978; previously published November 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. These specifications cover requirements for monocrystalline silicon epitaxial